sputtering materials for vlsi and thin film devices

Download or Read online Sputtering Materials For Vlsi And Thin Film Devices full HQ books. Available in PDF, ePub and Kindle. We cannot guarantee that Sputtering Materials For Vlsi And Thin Film Devices book is available. Click Get Book button to download or read books, you can choose FREE Trial service. Join over 650.000 happy Readers and READ as many books as you like (Personal use).

Sputtering Materials for VLSI and Thin Film Devices
Author :
Publisher : William Andrew
Release Date :
ISBN 10 : 0815519877
Pages : 608 pages
Rating : /5 ( users)
GET BOOK!

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Sputtering Materials for VLSI and Thin Film Devices

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such

GET BOOK!
The Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and

GET BOOK!
Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications discusses in detail, the recent trends in designing, fabricating and manufacturing of smart coatings and thin films for future high-tech. industrial applications related to transportation, aerospace and biomedical engineering. Chapters cover fundamental aspects and diverse approaches

GET BOOK!
High Mobility Materials for CMOS Applications

High Mobility Materials for CMOS Applications provides a comprehensive overview of recent developments in the field of (Si)Ge and III-V materials and their integration on Si. The book covers material growth and integration on Si, going all the way from device to circuit design. While the book's focus is

GET BOOK!
TMS 2016 Supplemental Proceedings

The TMS 2016 Annual Meeting Supplemental Proceedings is a collection of papers from the TMS 2016 Annual Meeting & Exhibition, held February 14-18 in Nashville, Tennessee, USA. The papers in this volume represent 21 symposia from the meeting. This volume, along with the other proceedings volumes published for the meeting, and archival journals, such

GET BOOK!
TMS 2016 145th Annual Meeting   Exhibition  Annual Meeting Supplemental Proceedings

Download or read online TMS 2016 145th Annual Meeting Exhibition Annual Meeting Supplemental Proceedings written by The Minerals, Metals & Materials Society (TMS), published by Springer which was released on 2016-12-01. Get TMS 2016 145th Annual Meeting Exhibition Annual Meeting Supplemental Proceedings Books now! Available in PDF, ePub and Kindle.

GET BOOK!
Nano optoelectronic Sensors and Devices

Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are light-weight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices

GET BOOK!
Ceramic Thick Films for MEMS and Microdevices

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation

GET BOOK!
Emerging Nanotechnologies in Dentistry

New nanomaterials are leading to a range of emerging dental treatments that utilize more biomimetic materials that more closely duplicate natural tooth structure (or bone, in the case of implants). The use of nanostructures that will work in harmony with the body’s own regenerative processes (eg, to restore tooth

GET BOOK!
Thin Film Device Applications

Two-dimensional materials created ab initio by the process of condensation of atoms, molecules, or ions, called thin films, have unique properties significantly different from the corresponding bulk materials as a result of their physical dimensions, geometry, nonequilibrium microstructure, and metallurgy. Further, these characteristic features of thin films can be drasti

GET BOOK!
Micromixers

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting

GET BOOK!
CMOS Past  Present and Future

CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of

GET BOOK!
Modern Technologies for Creating the Thin film Systems and Coatings

Development of the thin film and coating technologies (TFCT) made possible the technological revolution in electronics and through it the revolution in IT and communications in the end of the twentieth century. Now, TFCT penetrated in many sectors of human life and industry: biology and medicine; nuclear, fusion, and hydrogen

GET BOOK!
Handbook of Thin Film Deposition Techniques Principles  Methods  Equipment and Applications  Second Editon

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques

GET BOOK!
Springer Handbook of Electronic and Photonic Materials

The second, updated edition of this essential reference book provides a wealth of detail on a wide range of electronic and photonic materials, starting from fundamentals and building up to advanced topics and applications. Its extensive coverage, with clear illustrations and applications, carefully selected chapter sequencing and logical flow, makes

GET BOOK!