nanolithography

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Nanolithography
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Publisher : Woodhead Publishing
Release Date :
ISBN 10 : 0857098756
Pages : 592 pages
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Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Nanolithography

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do

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Nanolithography

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a

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Nanolithography and Patterning Techniques in Microelectronics

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale.

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Advances in Micro Nano Electromechanical Systems and Fabrication Technologies

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices

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Micro Nanolithography

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is

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Selected Topics in Nanoscience and Nanotechnology

Selected Topics in Nanoscience and Nanotechnology contains a collection of papers in the subfields of scanning probe microscopy, nanofabrication, functional nanoparticles and nanomaterials, molecular engineering and bionanotechnology. Written by experts in their respective fields, it is intended for a general scientific readership who may be non-specialists in these subjects, but

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Nanofabrication

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and

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Nano Lithography

Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday

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Nanolithography of Biointerfaces

This book discusses how the combination of physical and organic chemistry will continue to drive advances in the field, and provide new approaches to understanding, and in turn, creating biomimetic materials with precisely controlled nanoscale structure in three dimensions.

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Laser Based Nano Fabrication and Nano Lithography

This book is a printed edition of the Special Issue "Laser-Based Nano Fabrication and Nano Lithography" that was published in Nanomaterials

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Nanolithography by Direct Write Ambient

Download or read online Nanolithography by Direct Write Ambient written by Robert Theisen Fayfield, published by Unknown which was released on 1995. Get Nanolithography by Direct Write Ambient Books now! Available in PDF, ePub and Kindle.

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Micro Nanolithography   A Heuristic Aspect on the Enduring Technology

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is

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Nanostructured Thin Films and Surfaces

These ten volumes provide an excellent, in-depth overview of all nanomaterial types and their uses in the life sciences. Each volume is dedicated to a specific material class and covers fundamentals, synthesis strategies, structure-property relationships, material behaviour finetuning, biological effects and applications in the life sciences. All important material classes

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Tip Based Nanofabrication

Nanofabrication is critical to the realization of potential benefits in the field of electronics, bioengineering and material science. One enabling technology in nanofabrication is Tip-Based Nanofabrication, which makes use of functionalized micro-cantilevers with nanoscale tips. Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved

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Scanning Probe Microscopy of Soft Matter

Well-structured and adopting a pedagogical approach, this self-contained monograph covers the fundamentals of scanning probe microscopy, showing how to use the techniques for investigating physical and chemical properties on the nanoscale and how they can be used for a wide range of soft materials. It concludes with a section on

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