Micro Electro Mechanical Systems (MEMS) are miniature devices or machines which integrate elements such as actuators, sensors and a processor to form microsystems. The automotive sector is currently the biggest consumer of MEMS and this market, driven by safety legislation, is expected to grow. Emerging applications in the aerospace field will face unique challenges related to harsh environmental conditions and reliability requirements. Chapters in the first half cover MEMS for a variety of automotive applications, including the role of MEMS in passenger safety and comfort, sensors for automotive vehicle stability control applications and automotive tire pressure monitoring systems, pressure and flow sensors for engine management and RF MEMS for automotive radar sensors. The second half describes MEMS for aerospace applications and covers devices for active drag reduction in aerospace applications, inertial navigation and structural health monitoring systems, and thrusters for nano- and pico-satellites. The contributions also include a selection of case studies which explore MEMS for harsh environment sensors in aerospace applications. The book concludes by considering the use of MEMS in space exploration and exploitation.including navigation systems, devices for health monitoring, drag reduction and MEMS thrusters for nano and pico satellites.