advanced surface metrology for micro nanofabrication

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Surface Metrology for Micro  and Nanofabrication
Author :
Publisher : Elsevier
Release Date :
ISBN 10 : 0128178515
Pages : 448 pages
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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

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Characterisation of Areal Surface Texture

The function of a component part can be profoundly affected by its surface topography. There are many examples in nature of surfaces that have a well-controlled topography to affect their function. Examples include the hydrophobic effect of the lotus leaf, the reduction of fluid drag due to the riblet structure

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Optical Measurement of Surface Topography

The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There

Nanofinishing Science and Technology

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