advanced surface metrology for micro nanofabrication

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Surface Metrology for Micro  and Nanofabrication
Author :
Publisher : Elsevier
Release Date :
ISBN 10 : 0128178515
Pages : 448 pages
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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Advanced Machining Processes of Metallic Materials

Advanced Machining Processes of Metallic Materials: Theory, Modelling and Applications, Second Edition, explores the metal cutting processes with regard to theory and industrial practice. Structured into three parts, the first section provides information on the fundamentals of machining, while the second and third parts include an overview of the effects

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Metrology and Standardization for Nanotechnology

For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology,

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Electrochemical Micromachining for Nanofabrication  MEMS and Nanotechnology

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The

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Measurement Technology for Micro Nanometer Devices

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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Advanced Techniques for Assessment Surface Topography

This publication deals with the latest developments in the field of 3D surface metrology and will become a seminal text in this important area. It has been prepared with the support of the European Community’s Directorate General XII and represents the culmination of research conducted by 11 international partners as

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Micro and Nanomanufacturing Volume II

This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force

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Nanotechnology Research Directions for Societal Needs in 2020

This volume presents a comprehensive perspective on the global scientific, technological, and societal impact of nanotechnology since 2000, and explores the opportunities and research directions in the next decade to 2020. The vision for the future of nanotechnology presented here draws on scientific insights from U.S. experts in the field, examinations

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Metrology and Diagnostic Techniques for Nanoelectronics

Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers

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Characterisation of Areal Surface Texture

The function of a component part can be profoundly affected by its surface topography. There are many examples in nature of surfaces that have a well-controlled topography to affect their function. Examples include the hydrophobic effect of the lotus leaf, the reduction of fluid drag due to the riblet structure

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Fundamental Principles of Engineering Nanometrology

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging

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Optical Measurement of Surface Topography

The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There

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Nanofinishing Science and Technology

Finishing is the final operation after a part is sized and shaped. Currently in high tech industries, there is a demand for nano level surface finishing of components. This process is done to improve the surface finish, to remove the recast layer, or to remove surface and sub-surface defects. The

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Advanced Nanomaterials and Nanotechnology

Nanoscale science and technology have occupied centre stage globally in modern scientific research and discourses in the early twenty first century. The enabling nature of the technology makes it important in modern electronics, computing, materials, healthcare, energy and the environment. This volume contains selected articles presented (as Invited/Oral/Poster

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Fundamentals of Microfabrication and Nanotechnology  Three Volume Set

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and

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Advances in Nanotechnology Research and Application  2012 Edition

Advances in Nanotechnology Research and Application / 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Nanotechnology. The editors have built Advances in Nanotechnology Research and Application / 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Nanotechnology in this eBook to be

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